Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495305 | Halogenated anti-reflective coatings | Tomoyuki Enomoto, Shin-Ya Arase, Rama Puligadda | 2002-12-17 |
| 6444320 | Thermosetting anti-reflective coatings for full-fill dual damascene process | Satoshi Takei, Yasuhisa Sone | 2002-09-03 |