Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476919 | Polarization-independent reflectometry and polarization-independent reflectometer | Tohru Mori, Kazumasa Takada | 2002-11-05 |
| 6402973 | Preparation of silicon substrate | Yasushi Maeda, Shinji Makikawa, Seiki Ejima | 2002-06-11 |