Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478040 | Gas supplying apparatus and gas substitution method | Tsutomu Kikuchi, Tetsuya Satou, Tetsuya Kimijima | 2002-11-12 |
| 6474136 | Method and apparatus for analyzing impurities in gases | Makoto Tanaka, Tetsuya Satou | 2002-11-05 |
| 6418781 | System for analyzing trace amounts of impurities in gases | Tsutomu Kikuchi, Makoto Tanaka, Hidetoshi Yoshida, Tetsuya Kimijima | 2002-07-16 |
| 6397660 | Gas analyzing apparatus | Tsutomu Kikuchi, Tetsuya Kimijima | 2002-06-04 |