TO

Tetsuya Oshino

NI Nikon: 2 patents #31 of 284Top 15%
📍 Kamakura, JP: #14 of 109 inventorsTop 15%
Overall (2002): #38,893 of 266,432Top 15%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6376849 Charged particle beam exposure apparatus mask and charged particle beam exposure apparatus — 2002-04-23
6356616 Apparatus and methods for detecting position of an object along an axis — 2002-03-12