Shiwen Li

NI Nikon: 1 patents #87 of 284Top 35%

Overall (2002): #118,172 of 266,432Top 45%

Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6417914	Stage device and exposure apparatus	—	2002-07-09