SK

Shintaro Kawata

NI Nikon: 2 patents #31 of 284Top 15%
Overall (2002): #42,028 of 266,432Top 20%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6403268 Reticles for charged-particle beam microlithography 2002-06-11
6403971 Beam-adjustment methods and apparatus for charged-particle-beam microlithography 2002-06-11