Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473226 | Silica glass member | Hiroki Jinbo | 2002-10-29 |
| 6442973 | Synthetic silica glass and its manufacturing method | Norio Komine, Akiko Yoshida, Hiroki Jinbo | 2002-09-03 |
| 6378340 | Manufacturing method of synthetic silica glass | Norio Komine, Hiroki Jinbo | 2002-04-30 |
| 6374639 | Silica glass and its manufacturing method | Norio Komine, Hiroki Jinbo | 2002-04-23 |
| 6373554 | Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus | Hiroki Jinbo | 2002-04-16 |
| 6339033 | Silica glass having superior durability against excimer laser beams and method for manufacturing the same | Hiroki Jinbo, Norio Komine, Akiko Yoshida | 2002-01-15 |