Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6356341 | Exposure device, beam shape setting device and illuminating area setting device | Masaichi Murakami, Noritsugu Hanazaki | 2002-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6356341 | Exposure device, beam shape setting device and illuminating area setting device | Masaichi Murakami, Noritsugu Hanazaki | 2002-03-12 |