Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479819 | Object observation apparatus and object observation | Yoichi Watanabe, Yoshiaki Kohama | 2002-11-12 |
| 6365897 | Electron beam type inspection device and method of making same | Akihiro Goto, Hiroshi Nishimura | 2002-04-02 |