Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6487063 | Electrostatic wafer chuck, and charged-particle-beam microlithography apparatus and methods comprising same | — | 2002-11-26 |
| 6465783 | High-throughput specimen-inspection apparatus and methods utilizing multiple parallel charged particle beams and an array of multiple secondary-electron-detectors | — | 2002-10-15 |
| 6444399 | Methods for achieving reduced effects of overlayer and subfield-stitching errors in charged-particle-beam microlithography, and device manufacturing methods comprising such microlithography methods | — | 2002-09-03 |
| 6429441 | Charged-particle-beam microlithography apparatus and methods exhibiting variable beam velocity, and device-manufacturing methods using same | — | 2002-08-06 |
| 6388261 | Charged-particle-beam microlithography apparatus and methods exhibiting reduced astigmatisms and linear distortion | — | 2002-05-14 |
| 6352799 | Charged-particle-beam pattern-transfer methods and apparatus including beam-drift measurement and correction, and device manufacturing methods comprising same | — | 2002-03-05 |
| 6337164 | Charged-particle-beam microlithography methods exhibiting improved pattern-feature accuracy, and device manufacturing methods comprising same | — | 2002-01-08 |