Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496247 | Exposure apparatus and exposure method | — | 2002-12-17 |
| 6456363 | Exposure control apparatus and method | — | 2002-09-24 |
| 6433347 | Charged-particle-beam projection-exposure methods and apparatus that selectively expose desired exposure units of a reticle pattern | — | 2002-08-13 |
| 6433649 | Non-reciprocal circuit element and millimeter-wave hybrid integrated circuit board with the non-reciprocal circuit element | Taro Miura, Makoto Hasegawa, Takahide Kurahashi, Hidenori Ohata, Sakae Henmi | 2002-08-13 |
| 6411364 | Exposure apparatus | — | 2002-06-25 |
| 6384898 | Projection exposure apparatus | Jiro Inoue | 2002-05-07 |
| 6350459 | Solubilized cosmetic composition with a pharmaceutical or cosmetic agent, a methacrylate copolymer and a cyclodextrin | Wataru Tokue, Kenzo Ito, Shoji Nishiyama | 2002-02-26 |