Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441963 | Multi-layered mirror | Masayuki Shiraishi | 2002-08-27 |
| 6377655 | Reflective mirror for soft x-ray exposure apparatus | Tokio Kato, Kuninori Shinada | 2002-04-23 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441963 | Multi-layered mirror | Masayuki Shiraishi | 2002-08-27 |
| 6377655 | Reflective mirror for soft x-ray exposure apparatus | Tokio Kato, Kuninori Shinada | 2002-04-23 |