Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499935 | Photomask case, transporting apparatus, and transporting method | Shinichi Hirakawa, Yutaka Endo | 2002-12-31 |
| 6473157 | Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate | — | 2002-10-29 |