Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495894 | Photonic device, a substrate for fabricating a photonic device, a method for fabricating the photonic device and a method for manufacturing the photonic device-fabricating substrate | Tomohiko Shibata, Teruyo Nagai, Mitsuhiro Tanaka | 2002-12-17 |
| 6492191 | Method for manufacturing an A1xGayInzN film using a metal film for heat radiation | Tomohiko Shibata, Teruyo Nagai, Mitsuhiro Tanaka | 2002-12-10 |
| 6426519 | Epitaxial growth substrate and a method for producing the same | Tomohiko Shibata, Yukinori Nakamura | 2002-07-30 |