Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436281 | Apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication | Jürgen Hammer, Andre Richter, Heinz-Dieter Petermann | 2002-08-20 |