Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461961 | Methods of manufacturing semiconductor devices with ruthenium films formed by CVD using an oxygen-containing reactant gas | Atsushi Sano | 2002-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461961 | Methods of manufacturing semiconductor devices with ruthenium films formed by CVD using an oxygen-containing reactant gas | Atsushi Sano | 2002-10-08 |