Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448172 | Manufacturing method of forming interconnection in semiconductor device | Yoshiaki Yamamoto | 2002-09-10 |
| 6399439 | Method for manufacturing semiconductor device | Nobuyuki Yamanishi | 2002-06-04 |
| 6376328 | Method for producing capacitor elements, and capacitor element | Fumiki Aiso | 2002-04-23 |
| 6346480 | Method for forming aluminum interconnection | Yoshiaki Yamamoto | 2002-02-12 |
| 6342714 | HSG lower electrode structure having a neck supported by a silicon layer | Ichiro Honma | 2002-01-29 |