Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479369 | Shallow trench isolation (STI) and method of forming the same | — | 2002-11-12 |
| 6444549 | Thermal processing of semiconductor devices | Toshiya Hayashi, Kouji Hamada, Naoharu Nishio, Shuichi Saito | 2002-09-03 |