Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498095 | CVD METHOD FOR PRODUCING AN INTERCONNECTION FILM BY DEPOSITING A LOWER LAYER TO FILL A RECESS PERFORMING A CLEANING STEP TO REMOVE DISSOCIATED REACTANT GAS, AND CONSEQUENTLY DEPOSITING AN UPPER LAYER THAT HAS A SMALLER IMPURITY CONCENTRATION THAN THE LOWER LAYER | — | 2002-12-24 |
| 6436032 | Data filing system for endoscope | Tadao Eto, Hiroyuki Shibata, Hiroko Ohishi, Shinichi Omori, Keiichi Hiyama +1 more | 2002-08-20 |