Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468357 | Remover for a ruthenium containing metal and use thereof | Kaori Watanabe, Norio Ishikawa, Kiyoto Mori | 2002-10-22 |
| 6465352 | Method for removing dry-etching residue in a semiconductor device fabricating process | — | 2002-10-15 |
| 6444583 | Substrate-cleaning method and substrate-cleaning solution | — | 2002-09-03 |
| 6423148 | Substrate-cleaning method and substrate-cleaning solution | — | 2002-07-23 |
| 6387190 | Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring | Shinya Yamasaki | 2002-05-14 |
| 6387821 | Method of manufacturing a semiconductor device | — | 2002-05-14 |