Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468701 | Stencil mask and method of forming the same | — | 2002-10-22 |
| 6447960 | Electron beam exposure mask and pattern designing method thereof | Hiroshi Yamashita | 2002-09-10 |
| 6351515 | High contrast ratio membrane mask | — | 2002-02-26 |