Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492070 | Electron beam exposure mask and method for manufacturing electron beam exposure mask | — | 2002-12-10 |
| 6462346 | Mask inspecting apparatus and mask inspecting method which can inspect mask by using electron beam exposure system without independently mounting another mask inspecting apparatus | — | 2002-10-08 |