Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440853 | Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low k, dual damascene interconnect integration | Sudhakar Allada | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440853 | Methylated oxide-type dielectric as a replacement for SiO2 hardmasks used in polymeric low k, dual damascene interconnect integration | Sudhakar Allada | 2002-08-27 |