Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498070 | Air gap semiconductor structure and method of manufacture | Ting-Chang Chang, Yi-Shien Mor | 2002-12-24 |
| 6435943 | Method of chemical mechanical polishing organic silicon material with low dielectric constant | Ting-Chang Chang | 2002-08-20 |
| 6423652 | Post-processing treatment of low dielectric constant material | Ting-Chang Chang, Yi-Shien Mor | 2002-07-23 |