Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497783 | Plasma processing apparatus provided with microwave applicator having annular waveguide and processing method | Nobumasa Suzuki, Manabu Matsuo | 2002-12-24 |
HO
Hirohisa Oda
Overall (2002): #205,406 of 266,432Top 80%
1
Patents 2002