Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482073 | Translation mechanism for a chemical mechanical planarization system and method therefor | — | 2002-11-19 |
| 6423638 | Filter apparatus and method therefor | — | 2002-07-23 |
| 6406555 | Point of use dilution tool and method | James Grootegoed | 2002-06-18 |