Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6389706 | Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method | Michael Lering, Sven Hahn | 2002-05-21 |