Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500315 | Method and apparatus for forming a layer on a substrate | Valli Arunachalam, Peter Ventzek, John C. Arnold | 2002-12-31 |
| 6476623 | Percent backsputtering as a control parameter for metallization | Scott C. Bolton, Sam S. Garcia | 2002-11-05 |
| 6451181 | Method of forming a semiconductor device barrier layer | Sam S. Garcia, Bradley P. Smith, Daniel J. Loop, Gregory N. Hamilton, Md. Rabiul Islam +1 more | 2002-09-17 |