Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6384482 | Method for forming a dielectric layer in a semiconductor device by using etch stop layers | Chih-Sheng Yang, Kuei-Chang Tsai, Chih-hung Shu | 2002-05-07 |
| 6336787 | Method for transferring wafers in a semiconductor tape-peeling apparatus | Chin-Hsiang CHANG, Chih-Shen Yang, Kuei-Chang Tsai | 2002-01-08 |