Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492248 | Few-particle-induced low-pressure TEOS process | Jen-Chieh Chang, Ching-Cheng Hsieh, Pei-Feng Sun | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492248 | Few-particle-induced low-pressure TEOS process | Jen-Chieh Chang, Ching-Cheng Hsieh, Pei-Feng Sun | 2002-12-10 |