Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492188 | Monitor method for quality of metal ARC (antireflection coating) layer | Tsai-Sen Lin, Bor-Shiun Wu, Tings Wang | 2002-12-10 |
| 6417099 | Method for controlling dopant diffusion in a plug-shaped doped polysilicon layer on a semiconductor wafer | Chung Shih Tsai, Der-Tgyr Fan, Tings Wang | 2002-07-09 |
| 6365064 | Method for evenly immersing a wafer in a solution | Chung Shih Tsai, Der-Tsyr Fan | 2002-04-02 |