Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488745 | Trap apparatus and method for condensable by-products of deposition reactions | — | 2002-12-03 |
| 6361607 | Apparatus for controlling polymerized teos build-up in vacuum pump lines | Paul Dozoretz | 2002-03-26 |