Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440293 | Electrode and electrolyte for use in preparation of nitrogen trifluoride gas, and preparation method of nitrogen trifluoride gas by use of them | Tatsuma Morokuma, Hiromi Hayashida | 2002-08-27 |
| 6361679 | Process for producing high-purity nitrogen trifluoride gas | Tatsuma Morokuma, Hiromi Hayashida | 2002-03-26 |