Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480755 | Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues | Masaki Ootani, Yasuhiro Marume, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-11-12 |
| 6463348 | Process control device and process control method enabling restoration of lot control | Yasuhiro Marume, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-10-08 |
| 6397119 | Semiconductor manufacturing system for simultaneous processing of prescribed number of lots | Yasuhiro Marume, Masaki Ootani, Takamasa Inobe, Katuya Oota, Yasuhiro Satou | 2002-05-28 |