Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391791 | Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof | Takaei Sasaki, Satoshi Aoyama, Shouichi Sakamoto | 2002-05-21 |