Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482750 | Method of manufacturing semiconductor device including a cleaning step, and semiconductor device manufactured thereby | — | 2002-11-19 |
| 6432815 | METHOD OF CLEANING A SILICON SUBSTRATE AFTER BLANKET DEPOSITING A TUNGSTEN FILM BY DIPPING IN A SOLUTION HAVING HYDROFLUORIC ACID, HYDROCHLORIC ACID, AND/OR AMMONIUM HYDROXIDE PRIOR TO PATTERNING THE TUNGSTEN FILM | — | 2002-08-13 |
| 6391113 | Semiconductor wafer processing apparatus and method of controlling the same | Toko Konishi | 2002-05-21 |