Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486558 | Semiconductor device having a dummy pattern | Kenji Yoshiyama | 2002-11-26 |
| 6461946 | Method of manufacturing semiconductor device | Takeshi Kitani, Katsumi Eikyu | 2002-10-08 |
| 6421932 | Method and apparatus for drying substrate plates | Kazuhiko Gommori, Kazuto Kinoshita, Isamu Akiba | 2002-07-23 |
| 6344697 | Semiconductor device comprising layered positional detection marks and manufacturing method thereof | — | 2002-02-05 |