Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500683 | Method of measuring trench depth of semiconductor device | Tadayuki Yoshiyama | 2002-12-31 |
| 6461938 | Method of producing semiconductor devices | — | 2002-10-08 |
| 6383832 | Pressure responsive device and method of manufacturing semiconductor substrate for use in pressure responsive device | — | 2002-05-07 |