Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433437 | Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device | Satoshi Aoyama | 2002-08-13 |
| 6340543 | Photomask, manufacturing method thereof, and semiconductor device | Yoshikazu Nagamura, Kazuhito Suzuki, Nobuyuki Yoshioka | 2002-01-22 |
| 6338923 | Photolithography mask having monitoring marks and manufacturing method thereof | Koji Tange | 2002-01-15 |