Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437284 | Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same | Tatsuki Okamoto, Tetsuya Ogawa, Keisuke Furuta, Tomohiro Sasagawa, Junichi Nishimae +2 more | 2002-08-20 |