Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468885 | Deposition of device quality, low hydrogen content, hydrogenated amorphous silicon at high deposition rates | Archie Harvin Mahan, Edith C. Molenbroek, Alan C. Gallagher, Brent P. Nelson, Yueqin Xu | 2002-10-22 |