Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448999 | Method for microlithographic writing with improved precision | Tomas Utterback, Carl During | 2002-09-10 |
| 6428940 | Method for pattern generation with improved image quality | — | 2002-08-06 |
| 6399261 | Pattern generator with improved precision | — | 2002-06-04 |
| 6373619 | Pattern generator with improved address resolution | — | 2002-04-16 |