Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477440 | Methods of treating a semiconductor wafer | — | 2002-11-05 |
| 6417117 | Spin coating spindle and chuck assembly | — | 2002-07-09 |
| 6403933 | Thermal conditioning apparatus | Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith | 2002-06-11 |