Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495921 | High aspect ratio metallization structures | Randle D. Burton | 2002-12-17 |
| 6346177 | Method of in-situ cleaning and deposition of device structures in a high density plasma environment | — | 2002-02-12 |