Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352916 | Method of forming plugs in multi-level interconnect structures by partially removing conductive material from a trench | Sanh D. Tang | 2002-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352916 | Method of forming plugs in multi-level interconnect structures by partially removing conductive material from a trench | Sanh D. Tang | 2002-03-05 |