Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6484060 | Layout for measurement of overlay error | Tim H. Bossart | 2002-11-19 |
| 6432591 | Overlay target design method with pitch determination to minimize impact of lens aberrations | Richard Holscher | 2002-08-13 |