Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479864 | Semiconductor structure having a plurality of gate stacks | — | 2002-11-12 |
| 6458685 | Method of forming a self-aligned contact opening | Dave Pecora | 2002-10-01 |
| 6444586 | Method of etching doped silicon dioxide with selectivity to undoped silicon dioxide with a high density plasma etcher | — | 2002-09-03 |
| 6432833 | Method of forming a self aligned contact opening | — | 2002-08-13 |
| 6337285 | Self-aligned contact (SAC) etch with dual-chemistry process | — | 2002-01-08 |