Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492267 | Low temperature nitride used as Cu barrier layer | Zhiping Yin, Eden Zielinski | 2002-12-10 |
| 6475855 | Method of forming integrated circuitry, method of forming a capacitor and method of forming DRAM integrated circuitry | — | 2002-11-05 |
| 6372574 | Method of forming a capacitor container electrode and method of patterning a metal layer by selectively silicizing the electrode or metal layer and removing the silicized portion | Richard H. Lane | 2002-04-16 |