Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417076 | Automated combi deposition apparatus and method | Richard Holscher, Ziad R. Hatab | 2002-07-09 |
| 6387289 | Planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies | — | 2002-05-14 |