Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375792 | Methods and apparatuses for removing material from discrete areas on a semiconductor wafer | Richard H. Lane | 2002-04-23 |
| 6376390 | Methods and apparatuses for removing material from discrete areas on a semiconductor wafer | Richard H. Lane | 2002-04-23 |
| 6358129 | Backing members and planarizing machines for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies, and methods of making and using such backing members | — | 2002-03-19 |